Advantages
Flow management and suction verification of small work piece are possible.
High accuracy: Max. ± 3% F.S.
Precise flow measurement is possible.
Quick response time: Max. 50 msec.
High-speed response is realized by incorporating a platinum sensor chip processed with silicon micromachining and contributes to shorten cycle time.
Built-in needle valve model.
Flow adjustable needle valve and sensor are integrated into one unit. Easy piping and space saving.
Bi-directional flow measurement is possible.
Bi-directional flow model allows for pre-setting the flow direction as desired, which gives you installation flexibility. It can be used as a reverse flow detector.
Convenient display function is provided.
Reversible display function allows the orientation of display to rotate when the sensor is used upside down.
2-color/dual display contributes to enhancing operability.
Operability is enhanced by the dual display. 2-color display allows for detecting abnormalities at a glance.
Flexible mounting options
By a mounting bracket, a panel mount bracket or a DIN rail mount bracket
No straight piping section required.
No straight piping section is required at either upstream or downstream side.
A variety of connections
Inch sizes are newly added.
Setting copy function is equipped.
Settings on master sensor can be copied to slave sensors.
Five types of gases can be measured.
Gas type switching functions is equipped.